Analytical Study of the Propagation of Fast Longitudinal Modes along wz-BN/AlN Thin Acoustic Waveguides

The propagation of the fundamental symmetric Lamb mode S0 along wz-BN/AlN thin composite plates suitable for telecommunication and sensing applications is studied. The investigation of the acoustic field profile across the plate thickness revealed the presence of modes having longitudinal polarization, the Anisimkin Jr. plate modes (AMs), travelling at a phase velocity close to that of the wz-BN longitudinal bulk acoustic wave propagating in the same direction. The study of the S0 mode phase velocity and coupling coefficient (K2) dispersion curves, for different electrical boundary conditions, has shown that eight different coupling configurations are allowable that exhibit a K2 as high as about 4% and very high phase velocity (up to about 16,700 m/s). The effect of the thickness and material type of the metal floating electrode on the K2 dispersion curves has also been investigated, specifically addressing the design of an enhanced coupling device. The gravimetric sensitivity of the BN/AlN-based acoustic waveguides was then calculated for both the AMs and elliptically polarized S0 modes; the AM-based sensor velocity and attenuation shifts due to the viscosity of a surrounding liquid was theoretically predicted. The performed investigation suggests that wz-BN/AlN is a very promising substrate material suitable for developing GHz band devices with enhanced electroacoustic coupling efficiency and suitable for application in telecommunications and sensing fields.